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Optimizing phosphorus diffusion for photovoltaic applications: Peak doping, inactive phosphorus, gettering, and contact formation
H. Wagner, A. Dastgheib-Shirazi, B. Min, A.E. Morishige, M. Steyer, G. Hahn, C. del Cañizo, T. Buonassisi, and P.P. AltermattJournal of Applied Physics 119, 185704 (2016)